3:15 PM - 3:30 PM
[11p-W351-9] Epitaxial growth of BiFeO3 films on Si substrates by sputtering method
Keywords:ferroelectrics, BiFeO3, MEMS
Oral presentation
6 Thin Films and Surfaces » 6.1 Ferroelectric thin films
Mon. Mar 11, 2019 1:00 PM - 5:00 PM W351 (W351)
Yoshiomi Hiranaga(Tohoku Univ.), Takashi Eshita(Wakayama Univ.), Takanori Kiguchi(東北大)
3:15 PM - 3:30 PM
Keywords:ferroelectrics, BiFeO3, MEMS