The 66th JSAP Spring Meeting, 2019

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9 Applied Materials Science » 9.2 Nanoparticles, Nanowires and Nanosheets

[11p-W833-1~12] 9.2 Nanoparticles, Nanowires and Nanosheets

Mon. Mar 11, 2019 1:15 PM - 4:30 PM W833 (W833)

Naoki Fukata(NIMS), Shinya Kano(Kobe Univ.)

3:45 PM - 4:00 PM

[11p-W833-10] High Density Formation of Hf-oxide Nanodots on Ultrathin SiO2 by remote O2 plasma enhanced MOCVD

〇Ryosuke Hasegawa1, Katsunori Makihara1, Akio Ohta1, Mitsuhisa Ikeda1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:Nanodots, Hf-oxide, Self Assembling Formation