The 66th JSAP Spring Meeting, 2019

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[11p-W834-1~18] 13.2 Exploratory Materials, Physical Properties, Devices

Mon. Mar 11, 2019 1:15 PM - 6:30 PM W834 (W834)

Takashi Suemasu(Univ. of Tsukuba), Hirokazu Tatsuoka(Shizuoka Univ.), Kenji Yamaguchi(QST), Kosuke Hara(Univ. of Yamanashi)

3:15 PM - 3:30 PM

[11p-W834-8] Influence of Ba/Si deposition rate ratio on the minority carrier life time of B-doped BaSi2 epitaxial films

〇Shu Sugiyama1, Yuki Kimura2, Yudai Yamashita1, Kaoru Toko1, Noritaka Usami2, Takashi Suemasu1 (1.Univ. Tsukuba, 2.Nagoya Univ.)

Keywords:semiconductor