The 66th JSAP Spring Meeting, 2019

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Symposium (Oral)

Symposium » Advanced ion microscopy for future nano scale materials and devices

[11p-W934-1~8] Advanced ion microscopy for future nano scale materials and devices

Mon. Mar 11, 2019 1:30 PM - 5:45 PM W934 (W934)

Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)

2:00 PM - 2:30 PM

▲ [11p-W934-2] NanoFabrication of Thin Films with Light Ions Beams

〇John Notte1, Brett Lewis1, Deying Xia1 (1.Carl Zeiss SMT, Inc)

Keywords:ion beams, nano fabrication