Design and fabrication of single-nanometer-scale graphene phononic crystals for thermal engineering by using focused helium ion beam

Hiroshi Mizuta; Mayeesha Haque; Seiya Kubo; Yoshifumi Oshima; Shinichi Ogawa; Manoharan Muruganathan

Presentation information

Symposium (Oral)

Symposium » Advanced ion microscopy for future nano scale materials and devices

[11p-W934-1~8] Advanced ion microscopy for future nano scale materials and devices

Mon. Mar 11, 2019 1:30 PM - 5:45 PM W934 (W934)

Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)

3:00 PM - 3:30 PM

▲ [11p-W934-4] Design and fabrication of single-nanometer-scale graphene phononic crystals for thermal engineering by using focused helium ion beam

〇Hiroshi Mizuta^1,3, Mayeesha Haque¹, Seiya Kubo¹, Yoshifumi Oshima¹, Shinichi Ogawa², Manoharan Muruganathan¹ (1.JAIST, 2.AIST, 3.Hitachi Cam Lab)

Keywords:graphene, phononic crystal, helium ion beam

We present our recent attempt of fabricating graphene phononic crystals (GPnC) in particular focus on the 3D analysis of non circular nanopore design and impacts on phononic band opening and novel measurement technique of GPnC thermal conductivity based on the heat spreader method.