[11p-W934-1~8] 先端イオン顕微鏡技術のナノスケール材料・デバイスへの展開

▲ [11p-W934-4] Design and fabrication of single-nanometer-scale graphene phononic crystals for thermal engineering by using focused helium ion beam

〇Hiroshi Mizuta^1,3、Mayeesha Haque¹、Seiya Kubo¹、Yoshifumi Oshima¹、Shinichi Ogawa²、Manoharan Muruganathan¹ (1.JAIST、2.AIST、3.Hitachi Cam Lab)

キーワード：graphene, phononic crystal, helium ion beam

We present our recent attempt of fabricating graphene phononic crystals (GPnC) in particular focus on the 3D analysis of non circular nanopore design and impacts on phononic band opening and novel measurement technique of GPnC thermal conductivity based on the heat spreader method.