[12a-M111-1~9] 15.7 Crystal characterization, impurities and crystal defects

[12a-M111-5] CO concentration in CZ furnace (III)

〇Yoshiji Miyamura¹, Hirofumi Harada¹, Satoshi Nakano¹, Shinichi Nishizawa¹, Koichi Kakimoto¹ (1.Kyushu Univ.)

Keywords:silicon, CZ, carbon

We investigated CO concentration in CZ furnace by using gas chromatograph. We analyzed individual CO concentration generated by (1) outgassing in the furnace, (2) reaction between quartz crucible and graphite crucible, and (3) reaction between carbon parts and SiO gas evaporated from the Si melt.