[12a-PA3-1~26] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12a-PA3-14] Mechanical milling processing on β-Ga₂O₃ powder

〇Hiroaki Kishimura¹, Ryu Deguchi¹, Matsumoto Hitoshi¹ (1.NDA)

Keywords:Ga2O3, mechanical milling

β-Ga₂O₃ powders were processed using a vibrational mechanical milling method. The prepared samples were characterized by X-ray diffraction analysis and Raman spectroscopy. The amount of α-Ga₂O₃ phase was increased as milling time increase. The processed powder was consisted of α-Ga₂O₃ at the end of the milling processing.