[12a-PA3-1~26] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

▲ [12a-PA3-3] Epitaxial growth of β-Bi₂O₃ thin films with mist CVD

〇(D)Zaichun Sun¹, Daichi Oka¹, Tomoteru Fukumura^1,2,3 (1.Dept. Chem., Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.Core Research Cluster, Tohoku Univ.)

Keywords:Bismuth oxide, Mist CVD, Epitaxial thin film