[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

▲ [12a-PB3-16] Fabrication of crystalline silicon solar cells by rapid heating with carbon heating tube

〇Toshitaka Kikuchi¹, Takashi Sugawara¹, Takuma Uehara¹, Tomoyoshi Miyazaki^2,1, Go Kobayashi³, Masahiko Hasumi¹, Takuji Arima¹, Toshiyuki Sameshima¹ (1.Tokyo University of Agriculture and Technology, 2.Techno Research., Ltd., 3.ORC MANUFACTURING CO.,LTD)

Keywords:solar cell, rapid-thermal-heating, microwave