[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-4] Impact of Casimir effect on miniaturization of nanodevices

〇(B)Takeru Kagawa¹, Takayuki Kawahara¹ (1.Tokyo University of Science)

Keywords:MEMS, quantum field theory, sensor

Current advances in the miniaturization of devices are becoming susceptible to the Casimir effect caused by the quantum field fluctuations. Therefore, we investigated the effect of a simplified model of MEMS acceleration sensor widely used (two parallel flat plates of 1 μm × 1 μm × 300 nm and a spring with a spring constant of 3.5 N / m). As a result, in the model of this time, although it is a condition of vacuum absolute zero, it was found that the influence was great when the interval between the flat plates was smaller than 30 nm.