HVPE-growth of AlN layers on patterned sapphire substrates

Hajime Fujikura; Taichiro Konno; Takeshi Kimura; Hideto Miyake

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[12a-W541-1~12] 15.4 III-V-group nitride crystals

Tue. Mar 12, 2019 9:00 AM - 12:15 PM W541 (W541)

Narihito Okada(Yamaguchi Univ.), Hajime Fujikura(SCIOCS)

9:00 AM - 9:15 AM

[12a-W541-1] HVPE-growth of AlN layers on patterned sapphire substrates

〇Hajime Fujikura¹, Taichiro Konno¹, Takeshi Kimura¹, Hideto Miyake² (1.SCIOCS Co. Ltd., 2.RIS, Mie Univ.)

Keywords:HVPE, AlN, PSS

HVPE-growth of AlN layers on patterned sapphire substrates (PSSs) led to formation on nano-rod and nano-plate structures. Under certain HVPE conditions, AlN thin layers having smooth surface suitable for LED fabrication were realized.