The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

3 Optics and Photonics » 3.13 Semiconductor optical devices

[12p-W611-1~11] 3.13 Semiconductor optical devices

Tue. Mar 12, 2019 1:45 PM - 4:45 PM W611 (W611)

Tomohiro Amemiya(Tokyo Tech), Atsushi Matsumoto(NICT)

3:30 PM - 3:45 PM

[12p-W611-7] Beam deflection characteristics of MEMS VCSEL integrated DBR waveguide scanner

Toshihiro Asahi1, Xiaodong Gu1, Takahiro Sakaguchi1, Fumio Koyama1 (1.FIRST, Tokyo Tech)

Keywords:VCSEL, Beam Deflector

In recent years, interest in robots, automobiles, and even fully automated manufacturing has increased. For these automatic driving, advanced 3D sensing technology is required. Since LiDAR is one of them and uses short wavelength light, it is possible to precisely measure the shape and distance of the object. In this report, we report on the deflection behavior of the device with tunable VCSEL integrated into distributed Bragg reflector waveguide for the realization of high-performance beam scanner indispensable for LiDAR system.