[12p-W611-1~11] 3.13 Semiconductor optical devices

[12p-W611-9] Theoretical and Experimental Analysis on Ion-Implantation-Induced Quantum Dot Intermixing for 1550 nm-Band Photonic Integrated Circuits

〇Atsushi Matsumoto¹, Yota Akaishi², Shohei Isawa², Yuichi Matsushima², Katsuyuki Utaka² (1.NICT, 2.Waseda Univ.)

Keywords:Quantum dot, Intermixing, Photonic Integrated Circuits

In this paper, we theoretically and experimentally investigated an ion implantation-induced quantum dot intermixing and its physical mechanism, and indicated not only large wavelength blue shift but that there is a property of improvement on the internal quantum efficiency.