[9a-PA2-1~40] 12.3 Functional Materials and Novel Devices

[9a-PA2-22] Fabrication of microwires-embedded PVDF thin-film sensor toward pressure mapping systems

〇Daisuke Tadaki¹, Shin Yamamiya¹, Teng Ma², Yuji Imai³, Ayumi Hirano-Iwata^1,2, Michio Niwano⁴ (1.RIEC, Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.National Inst. of Tech., Sendai College, 4.Tohoku Fukushi Univ.)

Keywords:pressure sensor, Polyvinylidene Fluoride (PVDF), pressure mapping

We have developed various sensors using Polyvinylidene Fluoride (PVDF) which is an organic ferroelectric material. In this study, we tried to fabricate a PVDF thin-film sensor with a novel structure, as a fundamental device toward pressure mapping systems. A thiol-modified Au was used as a bottom electrode, and Ag microwires were used as counter (top) electrodes, which were separately embedded in the PVDF thin-film. We will report our trial of the device fabrication in this presentation.