The 66th JSAP Spring Meeting, 2019

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[9a-S223-1~9] 7.2 Applications and technologies of electron beams

Sat. Mar 9, 2019 9:30 AM - 12:00 PM S223 (S223)

Mitsunori Kitta(AIST), Takashi Kawakubo(Ntl. Intst. of Tech., Kagawa College)

11:30 AM - 11:45 AM

[9a-S223-8] Cleaning process for W (011) field emission cathode coated with liquid gallium

〇Yuta Takafuji1,2, Yoichiro Neo1,2, Hidenori Mimura1,2 (1.Grad. Sch. of Eng. Shizuoka Univ., 2.RIE)

Keywords:field emission cathode, liquid gallium