[9a-W242-1~12] 12.6 Nanobiotechnology

△ [9a-W242-1] Fine tuning pore surface charge coating with extremely thin Al₂O₃ layer

〇Tomoki Hayashida¹, Makusu Tsutsui¹, Masateru Taniguchi¹ (1.ISIR)

Keywords:micropore, Atomic Layer Deposition, surface zeta potential

We fabricated a micropore device coating with Al₂O₃ membrane in the range of 1nm to 20 nm using Atomic layer deposition (ALD). Using this device, we measured ionic current changes when particles passing through micropores and investigated pulse size and changes of detection frequency comparing each Al₂O₃ thickness. When we used carboxylated-polystyrene beads (φ0.78 μm), particle translocation speed increased depending on Al₂O₃ layer thickness. Therefore we measured the zeta potential on the pore-surface. The zeta potential measurement on the surface of the Si₃N₄/Al₂O₃ membrane revealed that the surface potential changes depending on the thickness of the coated Al₂O₃, by the preserved influence of the negative charge on the Si₃N₄ surface under the Al₂O₃.