11:40 AM - 11:50 AM
[9a-W521-10] Yield Enhancement
Keywords:semiconductor, impurities, cleaning
Presentation information
Special Symposium
Special Symposium » International Roadmaps on Systems and Devices 2019, Searching xenogeneic technology innovations
[9a-W521-1~11] SP3 International Roadmaps on Systems and Devices 2019, Searching xenogeneic technology innovations
Sat. Mar 9, 2019 9:00 AM - 12:00 PM W521 (W521)
Tetsuya Tatsumi(Sony Semiconductor Solutions), Hitoshi Wakabayashi(Tokyo Tech)