[9a-W631-1~12] 3.7 Laser processing

[9a-W631-2] Pulse Width Dependence on LIPSS Formation by Ultra-Short Pulse Laser Irradiation

〇(M1C)Syusuke Yoshikawa¹, Reina Miyagawa¹, Hwan Hong Lim², Takunori Taira^2,3, Osamu Eryu¹ (1.Nagoya Inst., 2.IMS, 3.RIKEN.RSC)

Keywords:Ultra-Short Pulse Laser, nano periodic structure, LIPSS

Laser-induced periodic structure (Fine-LIPSS) with a period of less than half the laser wavelength is expected to be applied in various applications, and it has been reported to be formed only with pulsed laser of femtosecond order. In this study, the pulse width was changed from femtosecond to nanosecond order, and the effect of laser pulse width and pulse weight on the formation of LIPSS was investigated. In the case of 450 fs, Fine-LIPSS with about 300 nm period were formed. In the case of 500 ps,Fine-LIPSS with about 300 nm period and LIPSS with about 700 nm period were formed. In the case of 1ns, LIPSS with about 700 nm period were formed. In the case of 2.5ns, LIPSS formation was not observed by irradiation.