[9a-W631-1~12] 3.7 Laser processing

[9a-W631-3] Scan Rate Dependence on LIPSS Period Formed on GaAs Substrate

〇(B)Hidenori Matsuura¹, Reina Miyagawa¹, Osamu Eryu¹ (1.Nagoya Inst.)

Keywords:femto-second laser, nano periodic structure

For the purpose of functional application of femtosecond laser induced periodic structure (LIPSS), we are working on control of crystal state and period of LIPSS. In previous studies, it was found that three different periods of LIPSS are formed in the irradiated region of the GaAs substrate. In order to understand this phenomenon, we investigated the effect by changing laser power and scanning rate.