[9a-W631-1~12] 3.7 Laser processing

[9a-W631-4] Periodic control of LIPSS by thin film deposition on sapphire

〇Kenzo Goto¹, Reina MIyagawa¹, Osamu Eryu¹ (1.Nagoya Institute of Technology)

Keywords:laser, LIPSS

A femtosecond laser can form a laser induced periodic structure (LIPSS) with a period shorter than the wavelength. This fine structure is expected to be applied in the mechanical and electronic fields and medical fields, but the practical application of this structure requires free control of the cycle of LIPSS. The possibility that the period of LIPSS can be controlled by the dielectric constant of the material to be irradiated has been shown [1]. In this study, we attempted periodic control of LIPSS formed on thin film and substrate by depositing thin films with different dielectric constant on sapphire substrate surface.