[9p-M113-1~8] 6.2 Carbon-based thin films

[9p-M113-3] Synthesis of Carbon Nitride Films with Various Crystallinity

〇Hitoe Habuchi¹, Ryosuke Kobayashi¹, Hiroaki Aoyama¹, Kazushi Yasuda¹ (1.Natl. Inst. Technol., Gifu Coll.)

Keywords:carbon nitride film, crystallinity, photocurrent

Carbon nitride films with various crystallinity were synthesized using a vapor deposition with melamine or guanidine carbonate as a source material. The crystallinity of the films is evaluated using an XRD peak of (002). The film under N2 at 700 Pa and using guanidine carbonate shows the worst crystallinity. The best crystallinity is the film synthsised in the air and using melamine.