[9p-M113-1~8] 6.2 Carbon-based thin films

[9p-M113-4] Emission spectrum of hydrogen in atmospheric pressure nitrogen plasma for carbon nitride synthesis

〇Kenichi Takarabe¹, Masaaki Hirai¹ (1.Okayama Univ. Sci.)

Keywords:carbon nitride, plasma

Carbon nitride is synthesized by using atmoshperic pressure nitrogen plasma. The sythesized carbon nitride unitentinally contains hydrogen. We have begun to investigate the correlation between the hydrogen emission spectra in the plasma and the hydrogen in the synthesized carbon nitride.