The 66th JSAP Spring Meeting, 2019

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9p-M114-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

Yasuo Cho(Tohoku Univ.), Wenchang Yeh(Shimane Univ.)

2:15 PM - 2:30 PM

[9p-M114-5] Carrier Distribution Imaging Using Higher-Harmonic ∂C/∂z-SNDM Signals

〇Yoshiomi Hiranaga1, Yasuo Cho1 (1.RIEC, Tohoku Univ.)

Keywords:probe microscopy, semiconductor, carrier distribution