Four terminal Cu-MIC poly-Ge<sub>x</sub>Sn<sub>1-x</sub> TFTs with high-k gate dielectric

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

Yasuo Cho(Tohoku Univ.), Wenchang Yeh(Shimane Univ.)

2:30 PM - 2:45 PM

〇Ryo Miyazaki¹, Hiroki Utumi¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:Germanium Tin, High-k, Four-terminal thin film transistor