Development of Low Temperature process Technology for Floating Gate Memory Device Fabrication on Plastic Substrate

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

Yasuo Cho(Tohoku Univ.), Wenchang Yeh(Shimane Univ.)

3:00 PM - 3:15 PM

〇(M2)Fumiyasu Kondo¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter,Hiroshima Univ)

Keywords:memory, PET