2019年第66回応用物理学会春季学術講演会

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6 薄膜・表面 » 6.4 薄膜新材料

[9p-PA1-1~28] 6.4 薄膜新材料

2019年3月9日(土) 13:30 〜 15:30 PA1 (屋内運動場)

13:30 〜 15:30

[9p-PA1-15] Epitaxial growth of CaNxHy thin films using reactive magnetron sputtering

Seoungmin Chon1、Shigeru Kobayashi1、Kazunori Nishio1、Ryota Shimizu1,2、Taro Hitosugi1 (1.Tokyo Tech、2.JST-PRESTO)

キーワード:Epitaxial thin film, Catalyst, Ammonia synthesis

Calcium compounds combined with nitrogen and hydrogen (CaNxHy) are promising catalysts for the production of ammonia, which is an important industrial chemical such as fertilizers. To precisely understand the mechanism of such catalytic reactions, it is required to prepare well-defined surfaces with smooth and highly-oriented structures. For this purpose, epitaxial thin films can provide an ideal platform. However, due to its chemical instability, there has been no report on the thin film fabrication. In this study, we introduce our approach to fabricate CaNxHy epitaxial thin films using reactive magnetron sputtering.