[9p-PA2-1~29] 12.4 Organic light-emitting devices and organic transistors

[9p-PA2-11] Investigation of influence for plasma nitridation treatment on gate insulating film of organic thin film transistor

〇Akihito Matsushita¹, Minakuchi Keiichirou¹, Hori Kabuto¹, Iwazaki Yoshitaka¹, Ueno Tomo¹ (1.Tokyo University of Agriculture and Technology)

Keywords:organic thin film transistor, plasma treatment, nitridation treatment