[9p-PA3-1~18] 6.2 Carbon-based thin films

[9p-PA3-1] Local structure analysis of Si-containing DLC films (II)

〇Kazuhiro Kanda¹, Takayuki Hasegawa^1,2, Hiroki Akasaka³ (1.LASTI, Univ. Hyogo, 2.Synchrotron Analysis L.L.C., 3.Sch. Tech., Tokyo Inst. Tech.)

Keywords:Si-containing diamond-like carbon film, X-ray absorption fine structure

Si K-edge X-ray absorption fine structure (XAFS) spectra of several Si-containing diamond-like carbon (Si-DLC) films, which had different composition ratios each other, were measured with the total electron yield (TEY) mode and the partial fluorescence yield (PFY) mode, which detect fluorescence intensity of Si K line with silicon drift detector, at BL05A in NewSUBARU synchrotron facility. It was revealed that it was not different in the composition ratio and structure of surface neighborhood and bulk of Si-DLC films, because spectral shape was not different in spectra with TEY mode and those with PFY mode. In addition, the peak width of white line was observed to broaden with increasing of Si content. It indicated the variation of local structure of Si atom by the surrounding chemical environment.