[9p-PA3-1~18] 6.2 Carbon-based thin films

[9p-PA3-11] Angle-resolved Photoelectron Spectroscopy Study of soft-ICP etching Damage Layer on Diamond Surface

〇Reito Wada¹, Kohei Takizawa¹, Yukako Kato², Ogura Masahiko², Makino Toshiharu², Yamasaki Satoshi², Nohira Hiroshi¹ (1.Tokyo city Univ., 2.AIST)

Keywords:diamond, power device, HAXPES

For the Diamond power device development, we will show the evaluation results of soft-ICP etching damage of diamond surface by using angular resolved HAXPES data.