[9p-PA3-1~18] 6.2 Carbon-based thin films

[9p-PA3-13] Growth of electric conductive AlGaN films on diamond (111) substrate by MBE

〇Shozo Kono¹, Kageura Taisuke², Kawai Sora², Buendia Jorge J.², Yabe Taichi², Kawarada Hiroshi^1,2 (1.RONL, Waseda Univ., 2.Fac. Sci. Eng., Waseda Univ.)

Keywords:diamond, AlGaN thin film