The 66th JSAP Spring Meeting, 2019

Presentation information

Print

Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[9p-PA3-1~18] 6.2 Carbon-based thin films

Sat. Mar 9, 2019 4:00 PM - 6:00 PM PA3 (PA)

4:00 PM - 6:00 PM

[9p-PA3-3] Organic Gas-Sorption Characteristics of the Carbonaceous Films Prepared by RF-Sputtering of Biomolecules

〇Tatsuki Omori1, Iwao Sugimoto1, Yoriko Suda1, Kazuhiko Takahashi2 (1.Tokyo Univ. of Technology, 2.Doshisha Univ)

Keywords:Gas-Sorption Characteristics, RF-Sputtering, Carbonaceous Films