[9p-PA3-1~18] 6.2 Carbon-based thin films

[9p-PA3-2] Thermal decomposition of amorphous carbon films and their structural chang

〇Hiroki Akasaka¹, Sarayut Tunmee², Chanan Euaruksakun², Ukit Rittihong², Ratchadaporn Supruangnet², Yuki Hirata¹, Naoto Ohtake¹ (1.Tokyo Inst. of Tech., 2.SLRI)

Keywords:Amorphous carbon films, sp2/sp3 ratio, Thermal decomposition

The mass of gas released by thermal decomposition from the amorphous carbon films was detected, and local change of sp2 / sp3 distribution in the film was observed by an X-ray photoelectron microscope (X - PEEM) using synchrotron radiation.