[9p-PA4-1~30] 6.3 Oxide electronics

[9p-PA4-21] The effect of grain boundary on carrier transport of degenerated transparent and conductive polycrystalline semiconductor thin films

〇Toshihiro Miyata¹, Tadatsugu Minami¹ (1.OEDS R&D Center KIT)

Keywords:TCO, AZO, grain boundary