[9p-PA4-1~30] 6.3 Oxide electronics

[9p-PA4-26] Influence of crystal structure of substrate on epitaxial growth of CaTaO₂N thin film

〇Takuto Wakasugi¹, Hirose Yasushi¹, Nakao Shoichiro¹, Harayama Isao², Sugisawa Yuki², Kikuta Junichi², Sekiba Daiichiro², Hasegawa Tetsuya¹ (1.Univ. of Tokyo, 2.Univ. of Tsukuba)

Keywords:oxynitride, perovskite, thin film