[9p-PA4-1~30] 6.3 Oxide electronics

[9p-PA4-30] Garnet-type Lithium-Ion Conductor LLZ film manufactured by MOCVD method

〇Sadayuki Ukishima¹, Naoki Tsukahara¹ (1.ULVAC,Inc.)

Keywords:solid electrolyte, MOCVD, lithiumu-ion conductor

Garnet type lithium ion conductor Li7La3Zr2O12(LLZ) shows bulk conductivity of the 4E-4S/cm at room temperature and shows electrochemical compatibility with lithium metal.Therefore, it is the most promising as a solid electrolyte of the oxide-based all-solid-state lithium ion batteries.The metalorganic chemical vapor deposition (MOCVD) method has the advantage such as high-speed film formation, superior step coverage characteristics.The MOCVD method is expected as the manufactural method of the solid electrolyte.The precursors of LLZ show a high melting point at standard state.Therefore, these precursors have a low vapor pressure, and it is difficult to vaporize stably. We examined for the steady supply method of the precursors in this study. And we established the manufactural process of LLZ films by the MOCVD method. We report a condition of MOCVD and the details of film properties.