[9p-PA5-1~12] 6.6 Probe Microscopy

[9p-PA5-10] Measurement of semiconductor sample using electrostatic force microscopy with amplitude-modulated microwave

〇Ryo Izumi¹, Yoshitaka Naitoh¹, Yan Jun Li¹, Yasuhiro Sugawara¹ (1.Osaka Univ.)

Keywords:Amplitude-modulation electrostatic force microscopy

In this research, we developed amplitude-modulation electrostatic force microscopy(AM-EFM) with microwave singal and measured a semiconductor sample using this technique. In the poster presentation, we will discuss the images obtained in our experiment and also compare the AM-EFM images with images obtained by scanning microwave impedance microscopy.