The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[9p-PB6-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

Sat. Mar 9, 2019 4:00 PM - 6:00 PM PB6 (PB)

4:00 PM - 6:00 PM

[9p-PB6-11] Formation of p, n layer of TOPCon structure using non mass separation type ion implantation method

Noboru Yamaguchi1, Hideo Suzuki1, Noriaki Tani1 (1.ULVAC ISET)

Keywords:TOPCon, Ion Implantation