[9p-PB6-1~15] 16.3 Bulk, thin-film and other silicon-based solar cells

[9p-PB6-12] Carrier recombination properties of a damaged layer in a Si substrate induced by reactive plasma deposition

〇Takefumi Kamioka^1,2, Yuki Isogai², Lee Hyunju², Riku Wakita², Tomohiko Hara², Yutaka Hayashi², Kyotaro Nakamura², Yoshio Ohshita², Atsushi Ogura¹ (1.Meiji Univ., 2.TTI)

Keywords:reactive plasma deposition, carrier recombination, interface