The 66th JSAP Spring Meeting, 2019

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15 Crystal Engineering » 15.1 Bulk crystal growth

[9p-S422-1~13] 15.1 Bulk crystal growth

Sat. Mar 9, 2019 1:30 PM - 6:00 PM S422 (S422)

Kei Kamada(Tohoku Univ.), Yuui Yokota(Tohoku Univ.)

3:00 PM - 3:15 PM

[9p-S422-3] Observation of Point Defect Distributions in Detached CZ Si Crystals from Melt (1) -Vacancy Concentrations in each predominant defect regions measured by DLTS-

〇Takao Abe1, Toru Takahashi1, Koun Shirai2 (1.Shin-Etsu Handotai, 2.ISIR, Osaka Univ.)

Keywords:Si melt growth, point defects, DLTS