[9p-W321-1~14] 23.1 Joint Session N "Informatics"

[9p-W321-6] Regression model of crystal growth simulation constructed by machine learning

〇Toru Ujihara^1,2,3, Yosuke Tsunooka^2,3, Can Zhu¹, Kentaro Kutsukake⁴, Taka Narumi⁵, Miho Tagawa^1,2, Shunta Harada^1,2 (1.IMaSS Nagoya Univ., 2.Nagoya Univ., 3.AIST, 4.RIKEN, 5.VBL Nagoya Univ.)

Keywords:crystal growth, optimization, cyber physical system

Our final target is to construct a cyber-physical-system (CPS) for crystal growth. In recent, we successfully developed the way to make the prediction model of CFD simulation results in SiC solution growth. The model can provide a CFD result immediately and make it possible to optimize a growth condition.