[9p-W541-1~8] Science created by singularity in nitride-semiconductors; Development of nano-characterization and control of material properties

[9p-W541-5] Development of a deep-ultraviolet scanning near-field optical microscope for PL mapping analysis of Al-rich AlGaN singularity-structures

〇Ryota Ishii¹, Mitsuru Funato¹, Yoichi Kawakami¹ (1.Kyoto Univ.)

Keywords:deep-ultraviolet, scanning near-field optical microscope, AlGaN