[9p-W541-1~8] Science created by singularity in nitride-semiconductors; Development of nano-characterization and control of material properties

[9p-W541-8] Doping technique utilizing graded AlGaN superlattices and its application to UV LEDs

〇Kazuaki Ebata¹, Yoshitaka Taniyasu¹, Kazuhide Kumakura¹ (1.NTT BRL)

Keywords:AlGaN, Superlattice, LED