1:30 PM - 2:00 PM
[9p-W621-1] [INVITED] Development of a non-contact optical surface flattening technology in a sub-nanometer scale
Keywords:non-contact optical surface flattening technology
Oral presentation
3 Optics and Photonics » 3.12 Nanoscale optical science and near-field optics
Sat. Mar 9, 2019 1:30 PM - 6:15 PM W621 (W621)
Masanobu Iwanaga(NIMS), Wakana Kubo(TUAT), Kotaro Kajikawa(Tokyo Tech)
1:30 PM - 2:00 PM
Keywords:non-contact optical surface flattening technology