The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

3 Optics and Photonics » 3.12 Nanoscale optical science and near-field optics

[9p-W621-1~16] 3.12 Nanoscale optical science and near-field optics

Sat. Mar 9, 2019 1:30 PM - 6:15 PM W621 (W621)

Masanobu Iwanaga(NIMS), Wakana Kubo(TUAT), Kotaro Kajikawa(Tokyo Tech)

1:30 PM - 2:00 PM

[9p-W621-1] [INVITED] Development of a non-contact optical surface flattening technology in a sub-nanometer scale

Takashi Yatsui1 (1.The Univ. of Tokyo)

Keywords:non-contact optical surface flattening technology