The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[9p-W935-1~14] 3.8 Optical measurement, instrumentation, and sensor

Sat. Mar 9, 2019 1:15 PM - 5:15 PM W935 (W935)

Tatsutoshi Shioda(Saitama Univ.), Toshihiro Somekawa(Inst. for Laser Tech.), Tatsuo Shiina(Chiba Univ.)

1:15 PM - 1:30 PM

[9p-W935-1] [Young Scientist Presentation Award Speech] Shape measurement with real-time correction of air fluctuation by use of two-color interferometry with optical frequency combs and synthetic wavelength

Yoshihisa Ikisawa1,2, Yoshiaki Nakajima1,2, Guanhao Wu3, Kaoru Minoshima1,2 (1.The Univ. of Electro-Communications1,, 2.JST, ERATO MINOSHIMA Intelligent Optical Synthesizer, 3.Tsinghua Univ.)

Keywords:comb, measurement, interferometer

我々は光コム2色干渉計による超高精度な空気屈折率補正法を用いて、形状計測への適用検討を行ってきた。本手法の特徴は、リアルタイムに空気のゆらぎを補正しながら遠隔物体の構造を高精度に計測できる点である。本研究では、2色法と合成波長による絶対距離測定法を組み合わすことで、信号強度が急激に変化する段差形状のような物体に対して、フィードバック制御に依らない高精度な形状計測を可能とし、適用範囲の拡大を行った。

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