Nozomi Yamamoto

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Speaker, Author, Co-Author

Tue. Sep 8, 2020 9:00 AM - 11:45 AM Z02

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[8a-Z02-1~10] 15.4 III-V-group nitride crystals

11:30 AM - 11:45 AM

△ [8a-Z02-10] Microstructure analysis of thick AlN films grown with sputter-deposited annealed AlN templates on nano-patterned sapphire substrates

〇Nozomi Yamamoto¹, Takeaki Hamachi¹, Yusuke Hayashi¹, Tesuya Tohei¹, Hedeto Miyake^2,3, Akira Sakai¹ (1.Grad. Sch. Eng. Sci., Osaka Univ., 2.Grad. Sch. Eng.,Mie Univ., 3.Grad. Sch. RIS3, Mie Univ.)

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