Atsushi Hiraiwa

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 1:00 PM - 5:30 PM Z04

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[10p-Z04-1~17] 13.7 Compound and power electron devices and process technology

2:45 PM - 3:00 PM

[10p-Z04-8] Current conduction in ALD-Al₂O₃/GaN capacitors formed by post-deposition annealing

〇Atsushi Hiraiwa^1,4, Kiyotaka Horikawa², Satoshi Okubo², Hiroshi Kawarada^1,2,3 (1.RONLI, Waseda Univ., 2.FSE, Waseda Univ., 3.KMLMST, Waseda Univ., 4.IMaSS, Nagoya Univ.)