Yoshiyuki Watanabe

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 12:30 PM - 5:30 PM Z10

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10p-Z10-1~17] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:15 PM

[10p-Z10-16] Development of MEMS Rogowski Coil Current Sensor and its Dependence of Sensing Properties on Current Path

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Kenichi Yoshida², Kazuyuki Sashida², Katsuya Ikeda², Ryosuke Ikeda², Toshiyuki Takemori² (1.Yamagata Res Inst Tech, 2.Shindengen)

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