11:00 AM - 11:15 AM ▲ [10a-Z05-10] Deposition of Crystallized Yttria Stabilized Zirconia (YSZ) Films on Cellulose Nanopaper (CNP) Substrates at Low Temperature by Reactive Sputtering 〇(M2)Jyotish Patidar1, Susumu Horita1 (1.JAIST)