11:00 〜 11:15 ▲ [10a-Z05-10] Deposition of Crystallized Yttria Stabilized Zirconia (YSZ) Films on Cellulose Nanopaper (CNP) Substrates at Low Temperature by Reactive Sputtering 〇(M2)Jyotish Patidar1、Susumu Horita1 (1.JAIST)